| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2000-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ee42d4171ff25e2f9d4dc8426f2585b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57499dea4a8015463a78a49f502ecff8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af4672f7ce34c085427262db520ac7f8 |
| publicationDate |
2002-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020026940-A |
| titleOfInvention |
Cmp composition containing silane modified abrasive particles |
| abstract |
A polishing composition comprising a dispersion of abrasive particles modified with silane formed by combining at least one metal oxide abrasive having at least one surface metal hydroxide with at least one silane compound, and a metal feature using the polishing composition. And a method of polishing a substrate shape such as an oxide shape. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100442549-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101243331-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101245545-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220094421-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150102990-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210046497-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220025593-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100704831-B1 |
| priorityDate |
1999-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |