| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23ccea75f3b22259bf081bb4d566141a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02365
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G23-047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate |
2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1671ba84f0ded426f4746735cd71b40c |
| publicationDate |
2002-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020023937-A |
| titleOfInvention |
Humidity sensor using nano-sized and porous TiO2-SnO2 thin films |
| abstract |
A semiconductor film of titanium oxide (TiO 2 ) and titanium oxide-tin oxide (TiO 2 -SnO 2 ) was prepared by a sol-gel method on an alumina substrate using a silver electrode, and is a humidity sensor using the semiconductor thin film. Titanium oxide and titanium oxide-tin oxide semiconductor films have a porous structure with nanoparticles. The oxide semiconductor film has a thickness of 480-580 nm, and the oxide semiconductor particles have a size of 10.8-13.1 nm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020077854-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3992622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109019679-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210068204-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007073111-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109019679-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100735031-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107748184-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107748184-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100812357-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104112821-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104112821-A |
| priorityDate |
2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |