| abstract |
SUMMARY OF THE INVENTION The present invention aims at stabilizing device characteristics and improving electron emission efficiency in planar electron emission devices.n n n It has a pair of electrodes l1 and l2 formed on the same plane of the insulating substrate 10 and forms conductive thin films l3 and l4 on them, and emits electrons on the thin films l3 and l4. In the planar electron emission device in which the portion (l7) is formed, the electron emission portion (l7) is composed of deposits (15) and (l6) containing boron and carbon, and alkylborane, arylborane, vinylborane, allylborane In the atmosphere containing any one of these, current 15 was flowed between the electrodes 11 and 1 to deposit the deposits 15 and 16. |