http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020019628-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6f175f2c8eac40363953838045e7c40 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02697 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00 |
| filingDate | 2000-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ae72d92dc91851bff5a9e7bc28bde71 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb915a72bc0994566d9a05e024b7eb5b |
| publicationDate | 2002-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020019628-A |
| titleOfInvention | micromirror array and method for fabrication the same and optic switch for use this |
| abstract | The present invention relates to a micromirror array, a method for manufacturing the same, and an optical switch using the same, wherein the micromirror array includes an optical switch for controlling an optical path between an input fiber bundle and an output fiber bundle, wherein the optical switch includes a plurality of micromirrors; An x-axis driver for driving each micromirror in the x-axis direction, a y-axis driver for driving each micromirror in the y-axis direction, and independently controlling the x-axis and y-axis rotational movements of each micromirror It includes a gimbal. Here, the x-axis driver and the y-axis driver is a piezoelectric driver having a cantilever shape. Therefore, micro-machining technology and semiconductor integrated process can realize small and light weight components, reduce component cost, lower driving voltage, and improve micro mirror driving response speed, thereby improving the performance of optical signal multiplexing system. can do. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100813257-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7573628-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008102963-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100451409-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100718143-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100759095-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040046253-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100446731-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020036304-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100926710-B1 |
| priorityDate | 2000-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.