| abstract |
Decomposition of fluorine compounds such as C 2 F 6 , CF 4 , CHF 3 , SF 6 , NF 3 to decompose the fluorine compound decomposition catalyst and one or more of CO, SO 2 F 2 and N 2 O in the presence of water or water and oxygen Contact with the catalyst. The catalyst for decomposing at least one of CO, SO 2 F 2 and N 2 O preferably comprises at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or oxide do.n n n According to the present invention, the fluorine compound can be converted into HF, which is easily absorbed by water or an aqueous alkali solution, and can also decompose substances such as CO, SO 2 F 2 or N 2 O generated by decomposition of the fluorine compound. . |