http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010112653-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 |
| filingDate | 2001-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010112653-A |
| titleOfInvention | Method for fabricating semiconductor devices |
| abstract | The present invention eliminates the step on the base member caused by the residual plating seed layer that remained at the portion where the electrode is in contact with the electropolishing solution and prevents contact with the electrolytic polishing liquid. It is to provide a method for manufacturing a semiconductor device that can be used. The method comprises the steps of forming a plating seed layer on the base member, forming a plating film on the plating seed layer in a region excluding the outer periphery of the base member by the plating process, and plating the plating seed layer by the electrolytic solution polishing process. And polishing with the surface, and selectively removing the plating seed layer remaining on the outer circumference of the base member. |
| priorityDate | 2000-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.