| abstract |
The present invention provides an oxidizing agent, a metal oxide dissolving agent, a protective film forming agent, a dissolving aid for the protective film forming agent and a polishing liquid for metal containing water, a manufacturing method thereof, and a polishing method using the same. Moreover, as a material for manufacturing this metal polishing liquid, this invention provides the metal polishing liquid material containing a metal oxide dissolving agent, a protective film forming agent, and the dissolution support agent of the said protective film forming agent. |