Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b2ac87aeadb161b83426d9cf6c4bdc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31938 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-126 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
filingDate |
2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e4b0fbe3a2b52085b3d23acf222b562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7304d49d90f5b98e29142e4651b11dd0 |
publicationDate |
2001-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20010095179-A |
titleOfInvention |
Humidity sensor and method for making |
abstract |
The humidity sensor element includes a pair of electrodes facing each other by a gap on an insulating substrate, an Si-containing base layer on the gap, and a humidity sensing thin film thereon. The humidity sensing thin film contains a crosslinked product of a conductive polymer having an ethylenically unsaturated group, and the base layer and the humidity sensing thin film are physically bonded by an interpenetrating polymer network structure. The humidity sensor element of the present invention is excellent in water resistance and can operate stably in a condensation atmosphere for a long time. Hysteresis is also not found and can be measured over a wide range of humidity. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100680311-B1 |
priorityDate |
2000-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |