http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010090740-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
| filingDate | 2000-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010090740-A |
| titleOfInvention | Ceramic heater |
| abstract | The present invention has a high thermal conductivity, so that the surface temperature of the heater plate quickly follows the temperature change of the heating element to efficiently control the temperature of the heating surface, and prevents the thermal diffusion of impurities (for example, Y) from the ceramic heater to the semiconductor wafer. To provide a ceramic heater. The ceramic heater of the present invention includes a heating element embedded in the surface of the ceramic substrate, and a heating surface having a surface roughness of Rmax = 0.05-200 µm based on JIS B 0601. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200101011-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102335036-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170062606-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100515702-B1 |
| priorityDate | 1999-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.