http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010086332-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-305 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225 |
| filingDate | 2001-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0451949d3b6bdab246e9ce8b8dbd1f02 |
| publicationDate | 2001-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010086332-A |
| titleOfInvention | Method For Observing Cross-Sectional Structure of Sample |
| abstract | DISCLOSURE OF THE INVENTION An object of the present invention is to provide a method for obtaining a microscope image in which the original sample surface shape is specified on the sample surface in the process of processing the cross section in the observation and processing technique of the observation section using the focused ion beam apparatus. The solution of the original sample was formed by first forming a coating layer of a material different from the sample surface on the raw sample surface, and then performing a deposition to form a protective layer, and then performing cross-sectional processing of the portion. The coating layer of another material is interposed between the surface and the portion where the protective layer is deposited by deposition, and the presence of the coating layer of this different material on the microscope can specify the original sample surface shape. . |
| priorityDate | 2000-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID995 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414326734 |
Total number of triples: 25.