| abstract |
The process of the present invention can provide nanotubes aligned vertically with the local surface of a flat or non-flat substrate with an average deviation of less than 15 ° and can also control for the diameter, length and position of the nanotubes. . In particular, the present invention utilizes high frequency plasma enhanced chemical vapor deposition (PECVD), which is advantageous with the chemical composition of acetylene-ammonia, and typically uses cobalt as the catalyst metal to achieve such results. |