| abstract |
Compounds of the following formulas 1, 2, 3, 4 or 5 are particularly suitable as photoinitiators in resist articles:n n n Formula 1n n n n n n n n Formula 2n n n n n n n n Formula 3n n n n n n n n Formula 4n n n n n n n n Formula 5n n n n n n n n Wherein R 1 is C 4 -C 9 cycloalkanoyl, C 1 -C 12 alkanoyl, C 4 -C 6 alkenoyl or benzoyl;n n n R 2 is for example phenyl, C 1 -C 20 alkyl, C 3 -C 8 cycloalkyl, C 2 -C 20 alkanoyl or benzoyl;n n n Ar 1 is substituted or unsubstituted R 4 S-phenyl or NR 5 R 6 -phenyl, or substituted or unsubstituted Or substituted or unsubstituted naphthyl or anthracyl, substituted or unsubstituted benzoyl, naphthalenecarbonyl, phenanthrenecarbonyl, anthracenecarbonyl or pyrenecarbonyl, or 3,4,5-trimethoxyphenyl, Phenoxyphenyl or biphenyl;n n n Ar 2 is substituted or unsubstituted Or substituted or unsubstituted naphthyl or anthracyl;n n n x is 2 or 3;n n n M 1 is, for example, when x is 2, substituted or unsubstituted phenylene, naphthalene or anthylene;n n n M 1 is a trivalent radical when x is 3;n n n M 2 is for example ego;n n n M 3 is for example C 1 -C 12 alkylene, cyclohexylene or phenylene;n n n n is 1 to 20;n n n R 3 is for example hydrogen or C 1 -C 12 alkyl;n n n R 3 ′ is C 1 -C 12 alkyl or substituted or —O—blocked C 2 -C 6 alkyl;n n n R 4 is for example hydrogen or C 1 -C 12 alkyl;n n n R 5 and R 6 are independently hydrogen, C 1 -C 12 alkyl or phenyl. |