http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010080295-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-02 |
| filingDate | 1999-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010080295-A |
| titleOfInvention | Method and system for measuring polycrystalline chunk size and distribution in the charge of a czochralski process |
| abstract | A method and system for determining the size of a polycrystalline silicon chunk for use in a Czochralski silicon growth process. Polycrystalline silicon chunks are arranged on the measurement background. The camera gets an image of the chunks. The image processor determines the area of the chunks based on the obtained image. Size parameters associated with the chunks are determined. |
| priorityDate | 1998-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 15.