http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010074855-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-453 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F15-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate | 1999-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010074855-A |
| titleOfInvention | Precursor chemistries for chemical vapor deposition of ruthenium and ruthenium oxide |
| abstract | In formula L y RuX z [here using chemical deposition techniques, L is a linear, branched or cyclic hydrocarbyl, cyclic alkene, diene, cyclic dienes, trienes, cyclic trienes, bicyclic alkene, by (E.g., halide, Si, S, S, N, N) selected from the group consisting essentially of halide, cyclic triene, tricyclic halogen, tricyclic diene and tricyclic triene, Wherein X is selected from the group consisting of CO, NO, CN, CS, nitrile, isonitrile, trialkylphosphine, trialkylphosphite, Trialkylamine and isocyanide, and y and z have values of from 1 to 3, or a compound of the formula L 1 Ru (CO) 4 , wherein L is a linear, branched, or cyclic ligand selected from the group consisting of Click hyde Is a neutral or monoanionic ligand selected from the group comprising cyclic dienes, carbenes, cyclic alkenes, dienes, cyclic dienes, trienes, cyclic trienes, bicyclic dienes and bicyclic trienes, A method of forming a film 18 of ruthenium or ruthenium oxide on the surface of the substrate 6 is provided. |
| priorityDate | 1998-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.