http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010047156-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae372ddaa494f2face39592b0429cc16 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-14 |
| filingDate | 1999-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1d201b88981043f8ac5174fd4897f6f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8de4f26ee43b029a16d924fb202bfa3f |
| publicationDate | 2001-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010047156-A |
| titleOfInvention | Apparatus for measuring submicrometer using optical interference system |
| abstract | The present invention relates to a moving distance measuring device using an optical interferometer, and more particularly, to a fine distance measuring device using an optical fiber interferometer to measure a fine distance of less than 1 micron without error.n n n The optical interferometer for the micro distance measurement according to the prior art has a mirror and a beam splitter configured in the path of the reference interferometer are exposed to air so that the reference path is changed by being influenced by external pressure, temperature or vibration. As a result, an error occurred in the measurement distance.n n n Therefore, in the present invention, by using an optical fiber coupler and an optical fiber collimator instead of a beam splitter in one path of the reference optical interferometer, it is possible to prevent the optical path as a reference from being exposed to air, thereby causing an error in the measurement distance. It provides a reduction effect. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107655600-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115219024-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115219024-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022114806-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220076146-A |
| priorityDate | 1999-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1491 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486887 |
Total number of triples: 20.