http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010022272-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1295 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1275 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 1998-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20010022272-A |
| titleOfInvention | Process for fabricating layered superlattice materials and abo3, type metal oxides and making electrionic devices including same without exposure to oxygen |
| abstract | The liquid precursor material containing the metal is applied to the first electrodes 28 and 58 to form the strontium bismuth tantalate layered superlattice material 30 and 60 (87), and is formed at 160 ° C in air. Dried at 1 temperature and then dried at a second temperature of 260 ° C. (88, 89), RTP baked at 300 ° C. in oxygen (90), RTP baked at 650 ° C. in nitrogen (91). And annealed at a temperature of 800 ° C. in nitrogen (93). After the second electrodes 32 and 77 are deposited, the device is patterned 95 to form capacitors 16 and 72, and the second anneal 96 is carried out at a temperature of 800 ° C. in nitrogen. In addition, the second annealing may be performed at a temperature of 600 ° C. or lower in oxygen. Thus, the high-magnet-quality thin films 30 and 60 of the layered superlattice material are produced without high temperature oxygen annealing. |
| priorityDate | 1997-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.