| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2000-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_991f14e09b7df4c85de2c23ffaee1f29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc06fc02c73c6e87f8e666163fedeed3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7499e0c8dbbb9caf64bbc72433d78ab2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_178e94dab545bde591bc54583473f4c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_797ebf1aec1903bb2a14433d0bca0414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9ac140a7c15f0e0ca21d27e232ac424 |
| publicationDate |
2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20010021370-A |
| titleOfInvention |
Multilayered body for photolithographic patterning |
| abstract |
According to the present invention, a multilayer structure includes: a water-insoluble antireflection film on the substrate surface and (A) 100 parts by weight of an alkali-soluble resin; (B) 0.5 to 20 parts by weight of an onium salt compound capable of generating an acid by actinic radiation; And (C) a negative photoresist layer of a specific photoresist composition containing 3 to 50 parts by weight of a glycoluril compound in which the N-position is substituted with at least one hydroxyalkyl group or an alkoxyalkyl group. A novel multilayer body for photolithography patterning of a photoresist layer from which a photoresist layer can be obtained is disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100842737-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1315043-A1 |
| priorityDate |
1999-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |