| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d527f9a5c3e991a1797de3518a88d14 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05573 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2000-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d749f6f2b07d6a4cfb199b9133ba9649 |
| publicationDate |
2001-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20010021185-A |
| titleOfInvention |
Contact structure formed by microfabrication process |
| abstract |
By fabricating a contactor on a semiconductor substrate with a micro fabrication technique, a contact structure is formed for making electrical contact with the contact target. The contact structure consists of a contact substrate and a plurality of contactors mounted on the contact substrate. Each contactor has a spherical contact to be connected to the contact target. Elasticity occurs when the contactor is pressed towards the contact target. Various contact structures and manufacturing methods are also described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100734296-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100502126-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030046854-A |
| priorityDate |
1999-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |