| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd7c27b9ec61781656e6f039702fd568 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 |
| filingDate |
1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd137ad4f4025a93c6867832d9aa0ca2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b573a879d4463854680e5c1bced522a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7960b2f1579d19075772376b87499a6e |
| publicationDate |
2001-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20010002430-A |
| titleOfInvention |
Organogallium compound, process for the preparation thereof and preparation of gallium nitride film using same |
| abstract |
The present invention relates to an organic gallium compound represented by the following Chemical Formula 1, in which a hydrazine-based ligand is bonded to a metal gallium, and an hexagonal gallium nitride thin film can be economically prepared by a simple method using the organic gallium compound according to the present invention. have:n n n n n R 2 (N 3 ) Ga (R'HNNR "H)n n n n n Wherein R, R 'and R "are each hydrogen or an alkyl group containing from 1 to 5 carbon atoms. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100454650-B1 |
| priorityDate |
1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |