http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000076995-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D213-643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D498-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2000-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000076995-A |
| titleOfInvention | Positive photoresist composition for far ultraviolet exposure |
| abstract | The present invention relates to a polymer containing a repeating unit represented by the formula (Ia) and a repeating unit represented by the formula (II) and at least one of the repeating units represented by the formula (Ib) Group-containing polymer as a photopolymerization initiator.n n n n n n n n Wherein R 1 and R 2 are each a hydrogen atom, a cyano group, a hydroxyl group, -COOH, -COOR 5 , -CO-NH-R 6 , -CO-NH-SO 2 -R 6 , an alkyl group, A hydrocarbon group or a -Y group, X represents -O-, -S-, -NH-, -NHSO 2 - or -NHSO 2 NH-, A represents a single bond or a divalent linking group, Z 2 represents -O- or -N (R 3 ) -, R 11 and R 12 each represent a hydrogen atom, a cyano group, a halogen atom or an alkyl group, Z 1 represents two bonded carbon atoms (CC ), And Y, R 3 , R 5 and R 6 are as defined in the specification. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100795109-B1 |
| priorityDate | 1999-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 375.