http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000076668-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F2013-225 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B60Q3-85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B60Q3-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G09F13-044 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2000-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000076668-A |
| titleOfInvention | Method for making of semiconductor device |
| abstract | In order to reduce the inter-wiring capacity, the problem of using Xerogel or fluorine resin in the interlayer insulating film between wirings, the problem in case of misalignment, etc. are solved to form a highly reliable wiring structure. A manufacturing method of a semiconductor device is provided.n n n In the method for manufacturing a semiconductor device having an interlayer insulating film 12 including a xerogel film or a fluororesin film, the lower layer of the interlayer insulating film 12 is formed of an organic film, and the upper layer of the interlayer insulating film 12 is a xerogel film. Alternatively, on the interlayer insulating film 12 formed of the fluororesin film, the first mask 25 serving as an etching mask when the interlayer insulating film 12 is etched to form the via contact hole 26 is formed. And a second mask 21 having a material different from that of the first mask 25 by forming the wiring groove 27 by etching the interlayer insulating film 12 on the first mask 25. It is a manufacturing method provided with the process of forming (). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531450-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7488687-B2 |
| priorityDate | 1999-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.