| abstract |
Alkali-soluble polysiloxane containing structural unit represented by following formula (I):n n n n n n n n Where n represents an integer of 1 to 6; L is -A-OCO-, -A-COO-, -A-NHCO-, -A-NHCOO-, -A-NHCONH-, -A-CONH-, -A-OCONH-,-A-CONHCO- and A divalent linking group selected from the group consisting of -AS-; A represents a single bond or an arylene group; X represents a single bond or a divalent linking group; Z represents a monovalent group selected from the group consisting of groups represented by the following formula (II-1) or (II-2):n n n n n n n n Wherein Y represents a hydrogen atom, a straight chain, branched or cyclic alkyl group, an aryl group or an aralkyl group; l represents an integer of 1 to 3; m represents the integer of 1-3. |