http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000076183-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00013 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 1998-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000076183-A |
| titleOfInvention | Methods for chemical mechanical polish of organic polymer dielectric films |
| abstract | A method of forming and planarizing polymeric dielectric films on a semiconductor substrate, and a method of achieving a fast chemical mechanical polishing removal rate when planarizing these films. The cured, fully planarized, polymeric dielectric thin film comprises (a) depositing a polymeric dielectric film composition on the surface of a semiconductor substrate; (b) curing the partially deposited film; (c) performing a chemical mechanical polishing process on the partially cured dielectric film until the dielectric film is sufficiently planarized; And (d) further curing the polished film. Preferred dielectric films are polyarylene ether and fluorinated polyarylene ether polymers deposited on semiconductor substrates by spin coating methods. The heat treatment partially cures the polymer. A chemical mechanical polishing step achieves full planarization. Another heat treatment is carried out to final cure the polymer. In this way, the removal rate of chemical mechanical polishing is increased relative to the removal rate of the fully cured polymer membrane. |
| priorityDate | 1997-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 88.