http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000064156-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_45a871940e4142780ac9452066dbfd8e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0493 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| filingDate | 2000-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b96c9fe446523a3ca1d6dc0bc4c5e9 |
| publicationDate | 2000-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000064156-A |
| titleOfInvention | The present invention is directed to a method of fabricating an integrated vacuum coating system incorporating a coating apparatus into a generally independent function. |
| abstract | The present invention is an integrated vacuum coating system (CO. Vacuum Coating System) made of each independent equipment as a single equipment, and can be coated in accordance with the characteristics of the individual materials in a single chamber that was previously coated in independent equipment, It is also possible to coat several materials at once. Thus, the equipment made by the present invention can save at least 50 ~ 60% equipment purchase cost and manufacturing cost than the existing equipment having an independent function, and has the characteristics of simultaneously obtaining the advantages obtained in each coating method.n n n In addition, the present invention can prevent the degradation of the product due to the movement of the target atmosphere, it is also possible to obtain a high quality product. In addition, the best configuration features of the present invention can rotate the target 360 °, to obtain a nose (Coporation) coating and uniformity (Uniformity), the height of the target is adjustable. Thermal sources are also specially designed and manufactured for High Voltage Feedthrogh's to use jigs to facilitate up, down, left and right position adjustments. Thermal Sources Various types can be easily selected and installed by users. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100934073-B1 |
| priorityDate | 2000-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.