| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
1999-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2d18612e1e433e65538267b88733ffe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cc67c9837a1eebd58d72aa0112360f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1bb55ffe8ccba50dcf78b1b1bcb4a25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cac0515d3b7ad97d42ac2c027183c462 |
| publicationDate |
2000-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20000048266-A |
| titleOfInvention |
Wafer holder of ion implantation apparatus |
| abstract |
A wafer holder disposed within a target chamber of an ion implantation apparatus, each wafer holder includes a wafer stand and an electrically conductive elastic body having a surface on which the wafer stand is placed and for holding the wafer. |
| priorityDate |
1998-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |