http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000047942-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C45-85 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-0803 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-167 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C45-85 |
| filingDate | 1999-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b83a4e99256d78659fe522235c5c42c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6adee253c7aa84eaea6b629cdc21b2df http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df7e4e845f09ac5569b9910bed9b87d7 |
| publicationDate | 2000-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000047942-A |
| titleOfInvention | Regeneration of metal cvd precursors |
| abstract | The present invention relates to 1,1,1,5,5 from metal-ligand complex by-products, Cu +2 (1,1,1,5,5,5-hexafluoro-2,4-pentanedionate- 1 ) 2 To recover a, 5-hexafluoro-2,4-pentanedione ligand.n n n Providing a process stream with a copper-ligand complex byproduct consisting of Cu +2 (1,1,1,5,5,5-hexafluoro-2,4-pentanedionate- 1 ) 2 ;n n n By cooling and condensing the copper-ligand complex byproduct consisting of Cu +2 (1,1,1,5,5,5-hexafluoro-2,4-pentanedionate- 1 ) 2 , the Cu +2 (1, Separating 1,1,5,5,5-hexafluoro-2,4-pentanedionate- 1 ) 2 in the process stream;n n n Cu-ligand complex by-products consisting of Cu +2 (1,1,1,5,5,5-hexafluoro-2,4-pentanedionate- 1 ) 2 , sulfuric acid, hydrochloric acid, hydroiodic acid, hydrobromic acid, Contacting a protonation agent selected from the group consisting of trifluoroacetic acid, trifluoromethanesulfonic acid, acid ion exchange resins, hydrogen sulfide, water and mixtures thereof;n n n Recovering 1,1,1,5,5,5-hexafluoro-2,4-pentanedione. |
| priorityDate | 1998-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 118.