http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000044195-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e3e8d2bb1c079b667311ac4f19d12b |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S359-904 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-015 |
| filingDate | 1998-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07d56bc285ae3833023f9abc8fdcba5c |
| publicationDate | 2000-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000044195-A |
| titleOfInvention | Active matrix thin film optical path controller and its manufacturing method |
| abstract | The present invention discloses an active matrix thin film optical path control apparatus and a method of manufacturing the same. The apparatus of the present invention is an active matrix type thin film optical path control apparatus including a plurality of active elements, a plurality of thin film piezoelectric actuators, and a plurality of micromirrors on a first conductive semiconductor substrate, wherein a horizontal stripe shape is formed on the substrate. A plurality of gate line pairs arranged in a plurality of gate lines, a plurality of source lines arranged in a vertical stripe shape on a layer different from a layer on which the plurality of gate line pairs are formed, and one of the gate lines and a plurality of gate line pairs A plurality of first gate electrodes respectively connected to one of the gate lines at each intersection of the odd-numbered source lines of the source lines, and one of the other gate lines and the plurality of source lines of each gate line pair; A plurality of second gate electrodes each connected to one other gate line at each intersection of even-numbered source lines And a second conductive source region formed near the surface of the substrate and connected to each source line, and a drain region and an odd number column of the second conductive type connected to any one electrode of each thin film piezoelectric actuator. The even-numbered column includes a plurality of active regions having a channel region coupled to the gate electrode and coupled to the second gate electrode. Therefore, in the present invention, display line defects due to damage to the gate oxide layer of the active element can be reduced by dot line defects. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101867726-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170076582-A |
| priorityDate | 1998-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.