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filingDate 1999-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d26f16f44d3a975af35bc076959451ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88a6ac5c8933ac582771b45113905be6
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publicationDate 2000-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20000035505-A
titleOfInvention Polishing composition and rinsing composition
abstract (Problem) In the polishing of sub-straight mirrors used in memory hard disks, the polishing rate is higher than that of the conventional polishing composition, the antifoaming property is high, and fine pits, micro projections and other surfaces are polished. In the polishing composition and the pretreatment and / or post-treatment of the mirror polishing of the substraightness, which can prevent the occurrence of defects, the antifoaming property is higher than that of the conventional rinse composition, Providing a rinse composition capable of sufficiently removing the chip).n n n (Solution means) A polishing composition comprising the following components (a) to (d) and a rinsing composition comprising the components (a) to (c) below.n n n (a) water,n n n (b) at least one compound selected from the group consisting of polystyrenesulfonic acid and salts thereof,n n n (c) a compound selected from the group consisting of inorganic acids, organic acids and salts thereof other than component (b), andn n n (d) at least one abrasive selected from the group consisting of aluminum oxide, silicon dioxide, cerium oxide, zirconium oxide, titanium oxide, silicon nitride and manganese dioxide.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101126530-B1
priorityDate 1998-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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