http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000035461-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-107 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 1999-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4777e38204f9f24001cd48b964f0099c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eaebfbda194031067b92a17b627bd4d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_601ba4a71019c4ad5d4dff3748ba6624 |
| publicationDate | 2000-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000035461-A |
| titleOfInvention | Positive resist fluid and positive resist composition |
| abstract | The present invention provides a positive resist liquid having excellent storage stability and low density dependence, a resist pattern having excellent low density dependence, and a positive photoresist composition having excellent sensitivity to short wavelength exposure. The positive resist liquid is composed of a resin containing a repeating unit represented by the formula (I), a photoacid generator, and a solvent as defined on the specification, and the positive photoresist composition for far ultraviolet exposure is a group having an alicyclic hydrocarbon structure. And an alkali-soluble group protected by and represented by at least one of formulas (pI) to (pVI), and a resin comprising both groups represented by formula (qI): (-AXR 5 ) as defined herein. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100795872-B1 |
| priorityDate | 1998-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 301.