http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000020137-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa85b9509fe8e25d0162494c3a8bd37a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-066 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-06 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20 |
| filingDate | 1998-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aea1bde30b3504f05bd201f85b7ad097 |
| publicationDate | 2000-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20000020137-A |
| titleOfInvention | A precursor compound for chemical vapor deposition of an aluminum thin film and a method of manufacturing the same |
| abstract | 1. TECHNICAL FIELD OF THE INVENTIONn n n The present invention relates to a precursor compound used to deposit an aluminum metal thin film, which is used as a wiring material of a semiconductor device, on a silicon substrate by chemical vapor deposition, a method for preparing the compound, and a method of depositing an aluminum thin film on a silicon substrate using the compound. The present invention provides an organometallic complex defined by the following Chemical Formula 1 and a method for producing the same.n n n <Formula 1>n n n H (R ') 2 Al: L n n n n In Formula 1, R 'is selected from alkyl having 1 to 4 carbon atoms, perfluoroalkyl, L is alkylalziridine, alkylazetidine, alkylpyrrolidine (Alkylazetidine) in heterocyclic amine ( Alkylpyrrolidine, Alkylpiperidine, Alkylhexamethyleneimine, Alkylheptamethyleneimine, Alkylmorphtamline, Alkylmorpholine, 1,4-Dialkylpiperazine (1,4-Dialkylpiperazine) Thiophene or thiopyran, n is an integer of 1 or 2. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100724084-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100316760-B1 |
| priorityDate | 1998-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.