| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-2077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-2086 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-0265 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S5-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
1998-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e7b093bed2f268229e42cf89866c2fc |
| publicationDate |
2000-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20000010507-A |
| titleOfInvention |
Mask for forming selective region diffraction grating and growing selective region and manufacturing method of semiconductor device using same |
| abstract |
The present invention describes a selective area diffraction grating, a mask for growth, and a method for manufacturing an electroabsorption modulated laser (EML) device using the same. The mask for forming a selective region diffraction grating and growing a selective region according to the present invention includes a +-or --shaped island-shaped pattern and a stripe pattern. When the selective region epitaxy is grown, the island-type pattern is removed, and the selective region growth is performed in the laser diode region using only the striped pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100464353-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102000735-B1 |
| priorityDate |
1998-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |