| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f953e662f0f4a6aedb6f11302833d60 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-03914
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-03849 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-11 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-528 |
| filingDate |
1998-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b23e84a8fc93cab9642abeeb90afaaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1cf568e2cddf89f25ff3ac9770d614be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_444fba762bb46a28416e90038863ef26 |
| publicationDate |
2000-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20000000778-A |
| titleOfInvention |
Indium bump manufacturing method using plasma |
| abstract |
In order to increase the height of the indium bumps and to improve the tensile strength of the bumps, the present invention is directed to depositing a protective layer, which is a material having no binding force with indium, on a chip; Opening a portion of the conductive metal pad where the bump is to be placed in the protective layer using photoresist patterning; Depositing UBM thereon without removing the patterning photoresist; Removing the photoresist to pattern a diffusion barrier layer; Forming an indium bump on the UBM having a larger cross-sectional area than the UBM; Reflow by exposing the indium bump to a plasma; Provided is a method of manufacturing indium bumps using plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100411144-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100521081-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100455679-B1 |
| priorityDate |
1998-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |