http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990077787-A
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-118 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D213-643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D471-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C229-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D409-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D498-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 1999-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1999-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-19990077787-A |
titleOfInvention | Positive photosensitive composition |
abstract | It is an object of the present invention to provide a positive photosensitive composition suitable for use in exposure having a wavelength of 250 nm or less, in particular 220 nm or less. The positive photosensitive composition comprises (A) a compound which generates an acid upon irradiation with actinic ray or radiation, (B) a monovalent multinuclear group represented by at least one of the following formulas (I), (II) and (III) (C) a compound represented by the formula (CI) or (CII), or a compound having at least one hydrophobic functional group and an organic group having from 5 to 30 carbon atoms, (I) containing at least one hydrocarbon group linked to the nitrogen atom or a naphthalene compound (ii) having at least one hydrophobic functional group and 10 to 30 carbon atoms:n n n n n n n n (Wherein the substituent is the same as described in the specification). |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100733855-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020012135-A |
priorityDate | 1998-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 609.