http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990065889-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S261-65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4482 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20 |
| filingDate | 1998-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19990065889-A |
| titleOfInvention | Method for lowering the viscosity of dimethylaluminum hydride useful as a precursor for the production of aluminum thin films |
| abstract | The present invention relates to a method for lowering the viscosity of dimethyl aluminum hydride (DMAH), which is useful as a precursor for the production of aluminum thin films, specifically, by adding aromatic amines to liquid dimethylaluminum hydride. The present invention relates to a method for significantly lowering the viscosity, wherein the mixed solution of dimethylaluminum hydride according to the present invention is used in a bubbler-type precursor transfer system when used as a metal-organic precursor in the preparation of a thin film by organometallic chemical vapor deposition. In addition to its excellent bubbling effect, it is easy to apply to the direct liquid injection type transfer system and increases the amount of dimethylaluminum hydride vaporized per unit time, which is useful for mass production of aluminum thin films. |
| priorityDate | 1998-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.