http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990062236-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-18 |
| filingDate | 1997-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19990062236-A |
| titleOfInvention | Ultraviolet light generator and its generating method |
| abstract | Disclosed are a device for generating ultraviolet rays generated from a BCl radical, which is a decomposition product thereof, when a BCl 3 gas is activated to be used as a light source for exposure equipment of a semiconductor device, and a method of generating the same. The apparatus of the present invention includes a reaction chamber into which BCl 3 gas is injected; Energy supply means for applying energy to activate the BCl 3 gas; Light inducing means for causing ultraviolet light emitted by stabilizing excitation BCl radicals, which are by-products generated when the BCl 3 gas supplied by the energy supply means is activated, to travel in a predetermined direction; And optical means inserted into the light guide means to focus the ultraviolet light passing through the light guide means. The method comprises the steps of injecting BCl 3 gas into the reaction chamber; Applying energy to activate the BCl 3 gas; Inducing ultraviolet light emitted by stabilizing excitation BCl radicals, which are by-products generated when the energized BCl 3 gas is activated, to travel in a predetermined direction; Focusing the induced far ultraviolet light. According to the present invention, it is possible to obtain far ultraviolet light, in which aberration is suppressed and light intensity can be easily adjusted. |
| priorityDate | 1997-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.