| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-06 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F277-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 |
| filingDate |
1997-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1999-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-19990057361-A |
| titleOfInvention |
Copolymer resin, preparation method thereof and photoresist using the resin |
| abstract |
The present invention relates to a copolymer resin for photosensitive films used in far ultraviolet rays such as KrF or ArF, a method for producing the same, and a photoresist containing the resin. The copolymer resin according to the present invention is polymerized by conventional radical polymerization by introducing mono-methyl cis-5-norbornene-endo-2,3-dicarboxylate unit into the norbornene-maleic anhydride copolymer structure. Easily, high transparency at 193nm wavelength, etching resistance is increased, and it can solve the odor problem generated in copolymer resin synthesis and can easily adjust the resin composition ratio in the molecular structure, so mass production is possible. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020082006-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100557594-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030035006-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100682168-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010011771-A |
| priorityDate |
1997-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |