http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990042242-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-36 |
| filingDate | 1997-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19990042242-A |
| titleOfInvention | Holder for analysis device for semiconductor samples |
| abstract | The present invention relates to a holder of a semiconductor sample analyzing apparatus capable of performing an insitu analysis of a state according to a temperature of a semiconductor sample.n n n The present invention provides a holder of an analysis device for a semiconductor sample having a heating coil provided therein so that analysis of a state according to a temperature of the semiconductor sample can be performed in situ, wherein the semiconductor sample seated on the holder is a predetermined region. And a fixing part for pressing and fixing the upper part of the semiconductor sample so as to be exposed and fixed to the holder at the same time.n n n Therefore, the use of the fixing portion for pressurizing the upper portion of the semiconductor sample has the effect of improving the reliability of the data of the analysis resulting from the performance of the analysis process of the state according to the temperature of the semiconductor sample. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100856019-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009104842-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8240649-B2 |
| priorityDate | 1997-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23954 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557109 |
Total number of triples: 14.