http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990016637-U
Outgoing Links
| Predicate | Object |
|---|---|
| filingDate | 1997-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1999-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19990016637-U |
| titleOfInvention | Semiconductor shower head |
| abstract | The present invention relates to a showerhead of a semiconductor, and in the related art, there is a problem in that a carbon-fluoro polymer (CF polymer) adhered to a showerhead surface is not completely removed, and physical force is applied to the showerhead to remove the polymer. When cleaning, there was a disadvantage that the use of a showerhead was not possible because it affected other process elements. The showerhead of the semiconductor of the present invention is generated during the process by coating a diamond with a predetermined thickness on one surface of a showerhead to which a polymer is attached. This not only improves the adhesion between the polymer and the showerhead, but also completely removes the polymer. |
| priorityDate | 1997-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.