http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980080924-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-50 |
| filingDate | 1998-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19980080924-A |
| titleOfInvention | The positive photosensitive composition |
| abstract | If the positive photosensitive composition has high photosensitivity, it can provide an excellent resist pattern, and there is little change in line width after exposure. The positive photosensitive composition includes a resin in an alkali developing solution and a compound represented by the formula (Ia) or (Ib) capable of generating a sulfonic acid by irradiation with actinic ray or radiation, including a resin having a group capable of decomposing by the action of an acid Lt; RTI ID = 0.0 > solubility &n n n n n n n n Wherein R 1 to R 3 represent a group represented by -SR 4 , which is a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a hydroxy group, a halogen atom, or R 4 is an alkyl group or an aryl group; X - represents a specific anion of benzenesulfonic acid, naphthalenesulfonic acid or anthracenesulfonic acid; l, m, and n represent an integer of 1 to 3; |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020090584-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100863732-B1 |
| priorityDate | 1997-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 296.