http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980071432-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J133-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J9-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 1998-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19980071432-A |
| titleOfInvention | Positive Photoresist Composition |
| abstract | The resin having an ester group represented by the following general formula [I] and a compound which generates an acid by irradiation with actinic rays or radiation are preferable for light in the wavelength region of 170 to 220 nm, and the adhesiveness at high sensitivity is high. It is possible to provide a positive photoresist composition which is excellent in obtaining a good resist pattern profile.n n n n n n n n (Wherein R 1 represents a hydrogen atom, an alkyl group or a cycloalkyl group. R 2, R 3 may be the same or different and represent a hydrogen atom, an alkyl group, a cycloalkyl group or -AR 4. R 2 and R 3 are bonded to form a ring. R 4 represents a hydrogen atom, an alkyl group or a cycloalkyl group, and R 4 and R 2 or R 3 may combine to form a ring. A represents an oxygen atom or a sulfur atom.) |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03036388-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100752250-B1 |
| priorityDate | 1997-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 278.