http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980070441-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 1998-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19980070441-A |
| titleOfInvention | Plasma immersion injection with pulsed anode |
| abstract | A method and apparatus for treating a workpiece injection surface by causing ions to impinge on the workpiece injection surface. The injection chamber 12 forms a chamber interior into which one or more workpieces can be inserted and includes a conductive inner wall portion 22 proximate to the chamber interior. The conducting workpiece support 30 is in the interior region of the injection chamber. Conductive electrode 32 is disposed in the injection chamber relative to the conductive workpiece support such that the workpiece is positioned on the workpiece support in the region 34 between the support and the conductive electrode. Gas molecules are injected into the injection chamber such that the gas molecules occupy an area of the injection chamber in close proximity to one or more workpieces. Gas molecules are ionized near the injection surface of the workpiece. The control circuit 100 pulses the conducting electrode at a positive potential with respect to the conducting workpiece support, the one or more workpieces, and the conducting wall portion of the injection chamber. The control circuit includes a voltage source having an electric field that accelerates before the ionized gas molecules settle on the injection surface of the one or more workpieces. |
| priorityDate | 1997-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 |
Total number of triples: 16.