http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980067823-A
Outgoing Links
| Predicate | Object |
|---|---|
| filingDate | 1997-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19980067823-A |
| titleOfInvention | A semiconductor device comprising a stringer preventing means and a method of manufacturing the same |
| abstract | The present invention relates to a semiconductor device having a stringer preventing means and a method of manufacturing the same. In the semiconductor device according to the present invention, an insulating film spacer covering the entire side of the gate stack is provided. The spacer converts the profile of the side of the gate stack with the high step from a vertical shape to a shape with a gentle slope. Therefore, even though the step height of the gate stack is high, the polysilicon stringer may be prevented from being present on the side of the gate stack even if the polysilicon layer is formed on the side of the gate stack and patterned to the storage node.n n n Therefore, it is possible to minimize the production rate of the semiconductor device inherent defects by suppressing the generation of contaminants in the subsequent process, including the cleaning process. |
| priorityDate | 1997-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 11.