http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980026794-A
Outgoing Links
| Predicate | Object |
|---|---|
| filingDate | 1996-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19980026794-A |
| titleOfInvention | Capacitors in Semiconductor Memory Devices |
| abstract | The present invention relates to a capacitor of a semiconductor memory device having a lower electrode and an upper electrode on which a dielectric material is disposed on a semiconductor substrate. The capacitor has a compositional phase separation, which has electrodes with increased surface area, and thus an effect of realizing increased capacitance. There is. |
| priorityDate | 1996-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452260893 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62687 |
Total number of triples: 9.