| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1997-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1998-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-19980024717-A |
| titleOfInvention |
Chemically amplified positive resist composition |
| abstract |
It is an object of the present invention to provide a positive type photoresist composition having high sensitivity and high resolving power and capable of obtaining an excellent resist pattern and having good heat resistance of the resist.n n n An alkali-soluble resin having a group capable of decomposing by crosslinking and action of an acid to increase solubility in an alkali developing solution, and a chemically amplifying positive resist containing a compound having a specific structure that generates sulfonic acid by irradiation with an actinic ray or radiation ≪ / RTI > |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101247623-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100848045-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100883541-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100784330-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100784310-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7674561-B2 |
| priorityDate |
1996-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |