http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980016889-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2223 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2211 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-14 |
| filingDate | 1996-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1998-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-19980016889-A |
| titleOfInvention | Particle Measuring Device for Semiconductor with Cyclone Focus |
| abstract | The present invention relates to a particle sizer for a semiconductor having a cyclone assembly that can be used to concentrate the particles such as dust in the air sample to be measured to measure the cleanliness of the air sample.n n n The particle size measuring device for semiconductors having the cyclone concentrator according to the present invention includes an inlet pipe of the particle size measuring instrument 1 through the converging tube 10 of the narrow end portion of the cyclone condenser 9 having the narrow end portion and the wide end portion. 5), the wide end portion is connected to the pump 2 of the particle measuring device 1 by an exhaust pipe 12, and the connecting pipe 6 through the side wall of the wide end portion of the cyclone collector 9 This is done by connecting.n n n Therefore, a large amount of fresh air is sampled to measure particles having a particle size of 0.1 μm within a short time, thereby providing a more reliable measurement result than the conventional particle size measuring device 1, and also providing a non-directional suction tube 13 By use, there is an effect that can provide a measurement result with a small deviation according to the sampling position. |
| priorityDate | 1996-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449334826 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61927 |
Total number of triples: 20.