| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2438-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F228-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F293-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-1408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F228-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-32 |
| filingDate |
2018-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2023-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2023-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102484626-B1 |
| titleOfInvention |
Preparation method of substrate |
| abstract |
This application relates to a method for manufacturing a substrate. In the present application, it is possible to provide a method for manufacturing a substrate on which contact/via holes are formed without variation in the diameter or shape of the hole while miniaturization capable of responding to the high degree of integration demand is possible. |
| priorityDate |
2018-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |