| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-32 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-266 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2022-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2022-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-102482878-B1 |
| titleOfInvention |
method of manufacturing integrated circuit device |
| abstract |
To manufacture an integrated circuit device, a DBARC film containing a chemically amplified polymer is formed on a substrate. A photoresist layer including a non-chemically amplified resin and PAG is formed on the DBARC layer. An acid is generated from the PAG in the first region by exposing a first region selected from the photoresist layer. The acid in the exposed first region is diffused into a first DBARC region facing the first region of the DBARC film. The photoresist layer and the DBARC layer are developed to remove the first region and the first DBARC region. |
| priorityDate |
2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |