http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102465745-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2020-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2022-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2022-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102465745-B1 |
| titleOfInvention | Slurry composition for organic film |
| abstract | The present invention relates to a slurry composition for polishing an organic film, and an aspect of the present invention includes abrasive particles; polishing enhancers containing organic acids; and a polishing inhibitor comprising a C2 or higher alkanolamine-based compound. |
| priorityDate | 2020-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 182.