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filingDate 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102465602-B1
titleOfInvention Thinner composition
abstract The present invention relates to thinner compositions. More specifically, it relates to a thinner composition capable of reducing the amount of photoresist used by applying RRC (Reduce Resist Coating), EBR (Edge Bead Removed) processes, etc., and removing unnecessary photoresist from the edge or back surface of a wafer.
priorityDate 2018-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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