http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102462032-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-00 |
filingDate | 2017-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2022-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2022-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-102462032-B1 |
titleOfInvention | Method for manufacturing a structure including a phase-separated structure |
abstract | A layer (BCP layer) containing the block copolymer on the substrate (1) using a resin composition for forming a phase-separated structure containing a block copolymer and an ionic liquid containing a compound (IL) having a cation moiety and an anion moiety ) (3), vaporizing at least a part of the compound (IL), and further phase-separating the BCP layer (3) to obtain a structure (3') including a phase-separated structure, a phase-separated structure comprising: A method of manufacturing a structure comprising |
priorityDate | 2016-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 161.